Special Section on the 2008 International Conference on Microelectronic Test Structures

The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.

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Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2009-02, Vol.22 (1), p.50-50
1. Verfasser:	Schmitz, Jurriaan
Format:	Artikel
Sprache:	eng
Schlagworte:	Circuit testing Europe Integrated circuit interconnections Integrated circuit measurements Integrated circuit testing Microelectronics Physics Process control Solid state circuits Special issues and sections
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Beschreibung
Zusammenfassung:	The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.
ISSN:	0894-6507 1558-2345
DOI:	10.1109/TSM.2008.2010725