Investigation of the Boron Particles Behavior in ICP/RF Plasma

This paper presents the results of preliminary modeling of the boron particles behavior in a mixing chamber downstream, the inductively coupled plasma or radio frequency (RF) torch, for boron nitride nanotubes (BNNTs) production. The 3-D computational fluid dynamics calculations of heating of boron...

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Veröffentlicht in:IEEE transactions on plasma science 2017-12, Vol.45 (12), p.3105-3109
Hauptverfasser: Matveev, Igor B., Serbin, Serhiy I., Goncharova, Nataliia A., Rosenberg, Michael
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Sprache:eng
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Zusammenfassung:This paper presents the results of preliminary modeling of the boron particles behavior in a mixing chamber downstream, the inductively coupled plasma or radio frequency (RF) torch, for boron nitride nanotubes (BNNTs) production. The 3-D computational fluid dynamics calculations of heating of boron particles by nitrogen plasma with plume power 15 and 30 kW in the mixing chamber with one and four feeding ports have been performed. The obtained results can be used for further design and optimization of the RF system for BNNTs production and new materials synthesis.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2017.2757261