Gamma and vacuum ultraviolet irradiations of ion implanted SiO 2 for MOS dielectrics

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Veröffentlicht in:	IEEE transactions on nuclear science 1974-12, Vol.21 (6), p.159-166
Hauptverfasser:	Emms, C. G., Holmes-Siedle, A. G., Groombridge, I., Thomson, J. J., Bosnell, J. R.
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Sprache:	eng
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source	IEEE Electronic Library (IEL)
title	Gamma and vacuum ultraviolet irradiations of ion implanted SiO 2 for MOS dielectrics
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