High-quality solenoid inductor using dielectric film for multichip modules

For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrat...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2005-06, Vol.53 (6), p.2230-2234
Hauptverfasser:	YOOK, Jong-Min, KO, Ju-Hyun, HA, Man-Lyun, KWON, Young-Se
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Dielectric Dielectric films Dielectric materials Dielectrics Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Gallium arsenide Inductors Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves multichip module (MCM) Multichip modules Nonhomogeneous media Q factor Q factors Silicon Silicon substrates solenoid Solenoids Spirals Textile industry UPILEX film
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Beschreibung
Zusammenfassung:	For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrate. Furthermore, it is possible to stack these inductors to make multichip modules using solder or gold stud bumps. From the measurement, solenoid inductors fabricated on 50-/spl mu/m-thick film showed very high Q factors and stable inductances.
ISSN:	0018-9480 1557-9670
DOI:	10.1109/TMTT.2005.848775