PLD-Fabricated Isotropic Pr-Fe-B Film Magnets Deposited on Glass Substrates

PLD-Fabricated Isotropic Pr-Fe-B Film Magnets Deposited on Glass Substrates

Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50 μm were emitted from a target and enabled us to obtain the...

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Veröffentlicht in:IEEE transactions on magnetics 2017-04, Vol.53 (4), p.1-4
Hauptverfasser: Yamashita, A., Hirotaki, K., Kurosaki, A., Yanai, T., Fukunaga, H., Fujiwara, R., Shinshi, T., Nakano, M.
Format: Artikel
Sprache:eng
Schlagworte:
Amorphous magnetic materials
Glass
Glass substrate
Glass substrates
Magnetic anisotropy
Magnetic films
Magnetic properties
Magnetism
micro-electro-mechanical systems (MEMS)
Pr–Fe–B film magnet
pulsed laser deposition (PLD)
Substrates
Thick films
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Beschreibung
Zusammenfassung:Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50 μm were emitted from a target and enabled us to obtain the relatively high deposition rate of 30 μm/h. An approximately 100 μm-thick Pr-Fe-B film with the (BH) max value of 70 kJ/m 3 could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2016.2633362