Generation of InGaZnO Nanoparticle by Ar/O 2 Plasma Exposure for Performance Improvement of Oxide TFTs

Generation of InGaZnO Nanoparticle by Ar/O 2 Plasma Exposure for Performance Improvement of Oxide TFTs

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Veröffentlicht in:IEEE transactions on electron devices 2024-07, Vol.71 (7), p.4160-4165
Hauptverfasser: Jeong, Myeonggi, Kim, Junyeong, Bae, Jinbaek, Mobiadul Islam, Md, Lee, Jiseob, Nahar, Sabiqun, Priyadarshi, Sunaina, Jang, Jin
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container_end_page 4165
container_issue 7
container_start_page 4160
container_title IEEE transactions on electron devices
container_volume 71
creator Jeong, Myeonggi
Kim, Junyeong
Bae, Jinbaek
Mobiadul Islam, Md
Lee, Jiseob
Nahar, Sabiqun
Priyadarshi, Sunaina
Jang, Jin
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doi_str_mv 10.1109/TED.2024.3404409
format Article
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title Generation of InGaZnO Nanoparticle by Ar/O 2 Plasma Exposure for Performance Improvement of Oxide TFTs
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