Foreword Special Issue on Low-Temperature Processing of Electronic Materials for Cutting Edge Devices
Thermal budgets hinder leading-edge ultra-scaled and novel designs, and moving to reduced temperature processing is becoming an acute impediment globally.
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Veröffentlicht in: | IEEE transactions on electron devices 2021-07, Vol.68 (7), p.3138-3141 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Thermal budgets hinder leading-edge ultra-scaled and novel designs, and moving to reduced temperature processing is becoming an acute impediment globally. |
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ISSN: | 0018-9383 1557-9646 |
DOI: | 10.1109/TED.2021.3083455 |