Achieving 1 Million Quality Factor in Fused Silica Planar Frame Resonator (PFR)

Achieving 1 Million Quality Factor in Fused Silica Planar Frame Resonator (PFR)

This letter reports the quality factor (Q-factor) of a fused silica planar frame resonator (PFR). The planar frame resonator is an axisymmetric structure composed of a beam head, a bridge, two wings, two longitudinal beams and a supporting tail. Fused silica PFR with 6 mm beam length is chemically e...

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Veröffentlicht in:IEEE transactions on components, packaging, and manufacturing technology (2011) packaging, and manufacturing technology (2011), 2023-05, Vol.13 (5), p.1-1
Hauptverfasser: Luo, Bin, Su, Zhaoxi, Shang, Jintang
Format: Artikel
Sprache:eng
Schlagworte:
Design optimization
Fused silica
fused silica resonators
Glass
Laser beams
planar frame resonator
Q factors
Q-factor
Quality factors
Resonant frequencies
Resonant frequency
Resonators
Silica glass
silica glass wafers
Silicon compounds
Structural design
Substrates
Tail
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Beschreibung
Zusammenfassung:This letter reports the quality factor (Q-factor) of a fused silica planar frame resonator (PFR). The planar frame resonator is an axisymmetric structure composed of a beam head, a bridge, two wings, two longitudinal beams and a supporting tail. Fused silica PFR with 6 mm beam length is chemically etched from a 500-μm-thick silica glass wafer. The resonant frequency of the flexural mode is measured to be 9654 Hz and the Q-factor as high as 1.13 million is acquired by the ringdown method. The Q-factor of the PFR has the potential of further improvement with structural design and fabrication optimization.
ISSN:2156-3950
2156-3985
DOI:10.1109/TCPMT.2023.3277597