Spatial distribution of excess carriers in electron-beam excited semiconductors
The steady-state one-dimensional carrier distribution in depth is computed for electron-beam excitation of semiconductors, including diffusion and surface recombination. An exmple is given for n-type GaAs bombarded by a 29-kV electron beam.
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Veröffentlicht in: | Proc. IEEE (Inst. Elec. Electron. Eng.), 55: 733-4 (May 1967) 55: 733-4 (May 1967), 1967-01, Vol.55 (5), p.733-734 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The steady-state one-dimensional carrier distribution in depth is computed for electron-beam excitation of semiconductors, including diffusion and surface recombination. An exmple is given for n-type GaAs bombarded by a 29-kV electron beam. |
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ISSN: | 0018-9219 |
DOI: | 10.1109/PROC.1967.5675 |