Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and...

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Veröffentlicht in:IEEE photonics technology letters 2004-05, Vol.16 (5), p.1328-1330
Hauptverfasser: Dumon, P., Bogaerts, W., Wiaux, V., Wouters, J., Beckx, S., Van Campenhout, J., Taillaert, D., Luyssaert, B., Bienstman, P., Van Thourhout, D., Baets, R.
Format: Artikel
Sprache:eng
Schlagworte:
Crosstalk
Drying
Etching
Fabrication
Lithography
Noise levels
Optical losses
Optical ring resonators
Particle scattering
Photonics
Propagation losses
Resonators
Silicon on insulator technology
Wire
Wires
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Beschreibung
Zusammenfassung:We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2004.826025