Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on Ba }}} Films

Electrically tunable solidly mounted thin film bulk acoustic resonators based on Ba x Sr 1-x TiO 3 films are reported for the first time. The films are acoustically isolated from the silicon substrate by a Bragg reflector stack. Applying DC bias induces piezoelectric effect and an acoustic resonance...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IEEE microwave and wireless components letters 2007-09, Vol.17 (9), p.655-657
Hauptverfasser:	Berge, J.., Vorobiev, A.., Steichen, W.., Gevorgian, S..
Format:	Artikel
Sprache:	eng
Schlagworte:	Bulk acoustic wave devices ferroelectric devices Film bulk acoustic resonators Optical films Piezoelectric films piezoelectric resonators Resonance Resonant frequency Semiconductor films Silicon Strontium Substrates Transistors tunable circuits and devices
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!