Switch-Matrix-Based High-Density Microelectrode Array in CMOS Technology

Switch-Matrix-Based High-Density Microelectrode Array in CMOS Technology

We report on a CMOS-based microelectrode array (MEA) featuring 11, 011 metal electrodes and 126 channels, each of which comprises recording and stimulation electronics, for extracellular bidirectional communication with electrogenic cells, such as neurons or cardiomyocytes. The important features in...

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Veröffentlicht in:IEEE journal of solid-state circuits 2010-02, Vol.45 (2), p.467-482
Hauptverfasser: Frey, U., Sedivy, J., Heer, F., Pedron, R., Ballini, M., Mueller, J., Bakkum, D., Hafizovic, S., Faraci, F.D., Greve, F., Kirstein, K.-U., Hierlemann, A.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Arrays
Bidirectional control
Cardiology
Channels
Circuit properties
CMOS
CMOS technology
CMOS-based microelectrode array (MEA)
Communication switching
Design. Technologies. Operation analysis. Testing
Electric, optical and optoelectronic circuits
Electrodes
Electronic circuits
Electronics
Exact sciences and technology
Extracellular
extracellular recording and stimulation
Integrated circuits
Low noise
Microelectrodes
Neural networks
neuronal interface
Neurons
reconfigurable switch matrix
Recording
Routing
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Spatial resolution
Stimulation
Switching, multiplexing, switched capacity circuits
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Beschreibung
Zusammenfassung:We report on a CMOS-based microelectrode array (MEA) featuring 11, 011 metal electrodes and 126 channels, each of which comprises recording and stimulation electronics, for extracellular bidirectional communication with electrogenic cells, such as neurons or cardiomyocytes. The important features include: (i) high spatial resolution at (sub)cellular level with 3150 electrodes per mm 2 (electrode diameter 7 ¿m, electrode pitch 18 ¿m); (ii) a reconflgurable routing of the recording sites to the 126 channels; and (iii) low noise levels.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2009.2035196