Square-Wave Long-Period Fiber Grating Fabricated With Double-Sided Laser-Assisted Wet Etching Technology
This study presents a square-wave double-sided long-period fiber grating sensor that was fabricated using pattern inscription by laser-assisted etching with a KrF 248-nm excimer and an aqueous solution of acid. We investigated the relationship between grating depth and the etching rate of the excime...
Gespeichert in:
Veröffentlicht in: | IEEE sensors journal 2020-07, Vol.20 (13), p.7082-7086 |
---|---|
Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | This study presents a square-wave double-sided long-period fiber grating sensor that was fabricated using pattern inscription by laser-assisted etching with a KrF 248-nm excimer and an aqueous solution of acid. We investigated the relationship between grating depth and the etching rate of the excimer laser-irradiated fused silica. The novelty of this sensor lies in the square-wave period grating structure created by a different etching rate on the surface of the optical fiber during the laser-assisted wet etching process and the designed period of two metal masks. We also conducted experiments that demonstrated the sensitivity of the square-wave double-sided long-period fiber grating sensor to temperature. The results showed that the average resonant wavelength/temperature ratio of the sensor was 0.054 nm/°C, while the transmission loss/temperature ratio was 0.038 dB/°C. |
---|---|
ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2020.2978872 |