A Fully Integrated Analog Compensation for the Piezo-Hall Effect in a CMOS Single-Chip Hall Sensor Microsystem
A magnetic sensor microsystem with Hall plates, temperature sensor, and stress sensor designed for the purpose of temperature-dependent piezo-Hall effect compensation has been implemented in 0.35μm CMOS technology. The sensor microsystem as well as the compensation method is entirely realized in int...
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Veröffentlicht in: | IEEE sensors journal 2015-05, Vol.15 (5), p.2924-2933 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A magnetic sensor microsystem with Hall plates, temperature sensor, and stress sensor designed for the purpose of temperature-dependent piezo-Hall effect compensation has been implemented in 0.35μm CMOS technology. The sensor microsystem as well as the compensation method is entirely realized in integrated analog circuitry. A dedicated stress sensor delivers a signal proportional to the sum of in-plane normal stresses. At the systems level, the analog circuit compensates the stress-related drift of the magnetic sensitivity by adding a current proportional to the stress sensor signal on top of the Hall plate supply current. After a three-temperature calibration of a sensor molded in a SOIC-8 package extending from -40 °C to +125 °C, the residual thermal drift of the magnetic sensitivity was reduced to |
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ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2014.2385879 |