Packaging Considerations for a Surface Acoustic Wave Strain Sensor
In this paper, packaging effects for a one port surface acoustic wave resonator (SAWR) strain sensor are considered. A one port non apodized SAWR fabricated on AT-X quartz is hermetically packaged using commercial off the shelf packages and standard strain gauge adhesives. The package geometry is su...
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Veröffentlicht in: | IEEE sensors journal 2012-05, Vol.12 (5), p.922-925 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In this paper, packaging effects for a one port surface acoustic wave resonator (SAWR) strain sensor are considered. A one port non apodized SAWR fabricated on AT-X quartz is hermetically packaged using commercial off the shelf packages and standard strain gauge adhesives. The package geometry is such to allow the final device to act as a modular general purpose SAWR strain sensor. Calibration of the packaged sensor was performed for a range of temperatures and loading conditions and the results are presented within this paper. |
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ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2011.2164790 |