Packaging Considerations for a Surface Acoustic Wave Strain Sensor

In this paper, packaging effects for a one port surface acoustic wave resonator (SAWR) strain sensor are considered. A one port non apodized SAWR fabricated on AT-X quartz is hermetically packaged using commercial off the shelf packages and standard strain gauge adhesives. The package geometry is su...

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Veröffentlicht in:IEEE sensors journal 2012-05, Vol.12 (5), p.922-925
Hauptverfasser: Donohoe, B., Geraghty, D., O'Donnell, G. E., Stoney, R.
Format: Artikel
Sprache:eng
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Zusammenfassung:In this paper, packaging effects for a one port surface acoustic wave resonator (SAWR) strain sensor are considered. A one port non apodized SAWR fabricated on AT-X quartz is hermetically packaged using commercial off the shelf packages and standard strain gauge adhesives. The package geometry is such to allow the final device to act as a modular general purpose SAWR strain sensor. Calibration of the packaged sensor was performed for a range of temperatures and loading conditions and the results are presented within this paper.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2011.2164790