Silicon-Based Photodetector for Infrared Telecommunication Applications

Silicon-Based Photodetector for Infrared Telecommunication Applications

In this work, the design and fabrication of a Cu/p-Si/Pt Schottky photodetector with a simple structure is investigated. The mechanism of electron flow is explained using internal photoemission theory, which is further applied to make the fabricated devices reach a high responsivity of 0.542 mA/W at...

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Veröffentlicht in:IEEE photonics journal 2021-04, Vol.13 (2), p.1-7
Hauptverfasser: Huang, Yu-Chieh, Parimi, Vivek, Chang, Wei-Che, Syu, Hong-Jhang, Su, Zih-Chun, Lin, Ching-Fuh
Format: Artikel
Sprache:eng
Schlagworte:
Annealing
Contact resistance
Correlation analysis
optical communication
Photodetectors
photodiodes
Photoelectric emission
Photometers
Platinum alloys
Resistance
Schottky barriers
semiconductor device manufacture
Silicides
Silicon
silicon photonics
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Beschreibung
Zusammenfassung:In this work, the design and fabrication of a Cu/p-Si/Pt Schottky photodetector with a simple structure is investigated. The mechanism of electron flow is explained using internal photoemission theory, which is further applied to make the fabricated devices reach a high responsivity of 0.542 mA/W at 0-V bias. The investigation revealed that the rapid thermal annealing process could significantly influence the device characteristics. Variations in Schottky barrier height and series resistance of the photodetectors were also analyzed and correlated with the device responsivity. With proper conditions to improve the Pt/Si ohmic contact, the device performance can be enhanced.
ISSN:1943-0655
1943-0655
1943-0647
DOI:10.1109/JPHOT.2021.3064068