Development of ScAlN PMUTs for Medical Applications

Development of ScAlN PMUTs for Medical Applications

In this paper, the design, fabrication and characterization of PMUTs for medical applications are discussed. Scandium (20% Sc/(Sc + Al)) doped AlN is used as the piezoelectric material. The fabrication process for PMUTs with a patterned piezoelectric layer is developed. Single-cell and linear arrays...

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Veröffentlicht in:Journal of microelectromechanical systems 2023-10, Vol.32 (5), p.1-8
Hauptverfasser: Karuthedath, Cyril Baby, Sebastian, Abhilash Thanniyil, Helisto, Panu, Sillanpaa, Teuvo, Karkkainen, Anu
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum nitride
cavity silicon on insulator (CSOI)
Electric potential
Electrical properties
Electrodes
Fabrication
III-V semiconductor materials
Linear arrays
Mechanical properties
Medical services
medical ultrasound
Piezoelectricity
PMUT
ScAlN
Scandium
Sensitivity
Stress
Voltage
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Zusammenfassung:In this paper, the design, fabrication and characterization of PMUTs for medical applications are discussed. Scandium (20% Sc/(Sc + Al)) doped AlN is used as the piezoelectric material. The fabrication process for PMUTs with a patterned piezoelectric layer is developed. Single-cell and linear arrays of PMUT are fabricated and electrical, mechanical and acoustic characterization is carried out. The piezo-patterning improved the performance of PMUTs. The fabricated PMUT showed excellent chip-wafer level uniformity and yield. At resonance (5.7 MHz), the ScAlN PMUT array showed transmit sensitivity of 13 kPa/V and receive sensitivity of 1.1 V/MPa. The good transmit-receive properties and the ability to operate without bias voltage make the ScAlN PMUTs best for voltage-limited medical applications. 2023-0131
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2023.3296159