Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes

Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes

In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single crystal silicon (SCS). The Q is reduced in both materia...

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Veröffentlicht in:Journal of microelectromechanical systems 2020-10, Vol.29 (5), p.1118-1120
Hauptverfasser: Alter, Anne L., Flader, Ian B., Chen, Yunhan, Shin, Dongsuk D., Kenny, Thomas W.
Format: Artikel
Sprache:eng
Schlagworte:
Amplitudes
Damping
Dissipation factor
energy dissipation
MEMS resonators
Micromechanical devices
nonlinear dissipation
Polysilicon
Q factors
Q-factor
Resonators
Single crystals
Temperature measurement
Wheels
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Zusammenfassung:In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single crystal silicon (SCS). The Q is reduced in both materials, up to 15.6%, and has a stronger influence on the measurements of Q in polysilicon than in SCS. Since the measured limiting dissipation mechanism in these resonators is thermoelastic dissipation (TED), we suggest these results align with models of amplitude-dependent TED. [2020-0160]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2020.3005323