A Second-Order Delta-Sigma Control of Dielectric Charge for Contactless Capacitive MEMS

A Second-Order Delta-Sigma Control of Dielectric Charge for Contactless Capacitive MEMS

This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus ty...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of microelectromechanical systems 2015-04, Vol.24 (2), p.259-261
Hauptverfasser: Gorreta, Sergi, Pons-Nin, Joan, Blokhina, Elena, Dominguez, Manuel
Format: Artikel
Sprache:eng
Schlagworte:
Capacitance
Dielectric charging control
Dielectrics
Enginyeria electrònica
Fractals
MEMS reliability
Microelectromechanical systems
Micromechanical devices
Modulation
Sensors
Sistemes microelectromecànics
Àrees temàtiques de la UPC
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2015.2402394