Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass
We propose a new replication process for the realization of thick microlenses in SiO 2 glass with low organic content. We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photo...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2006-10, Vol.15 (5), p.1159-1164 |
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| creator | Orhan, J.-B. Parashar, V.K. Sayah, A. Gijs, M.A.M. |
| description | We propose a new replication process for the realization of thick microlenses in SiO 2 glass with low organic content. We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photoresist (Clariant AZ 9260), applied to a glass substrate and soft-baked. After demoulding, we obtain cylindrical pillars that are given a dome-like shape by a thermal softening. This structure is used as a master in a second PDMS replication step. An in-house developed sol-gel glass material with low organic content is then poured in the second PDMS replica and subsequently thermally treated to obtain an array of thick, dense and crack-free microlenses. We characterize the shrinkage and the surface roughness of the microlenses. Using imaging of millimeter-size objects in an optical microscope setup, we characterize basic optical properties of the lenses, like focal length, magnification, and distribution of the light intensity around the focal plane |
| doi_str_mv | 10.1109/JMEMS.2006.879696 |
| format | Article |
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We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photoresist (Clariant AZ 9260), applied to a glass substrate and soft-baked. After demoulding, we obtain cylindrical pillars that are given a dome-like shape by a thermal softening. This structure is used as a master in a second PDMS replication step. An in-house developed sol-gel glass material with low organic content is then poured in the second PDMS replica and subsequently thermally treated to obtain an array of thick, dense and crack-free microlenses. We characterize the shrinkage and the surface roughness of the microlenses. Using imaging of millimeter-size objects in an optical microscope setup, we characterize basic optical properties of the lenses, like focal length, magnification, and distribution of the light intensity around the focal plane</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2006.879696</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Arrays ; Circuit properties ; Electric, optical and optoelectronic circuits ; Electronics ; Exact sciences and technology ; Fabrication ; Focal plane ; Glass ; Glass substrates ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Integrated optics. Optical fibers and wave guides ; Lenses ; Mechanical instruments, equipment and techniques ; micro-optics ; Microlens array ; Microlenses ; Micromechanical devices and systems ; micromoulding ; Microoptics ; Optical and optoelectronic circuits ; Optical materials ; Optical microscopy ; Organic materials ; photoresist ; Photoresists ; Physics ; poly-dimethylsiloxane (PDMS) replication ; Replication ; Resists ; Shape ; Silicone resins ; Softening ; Sol gel process ; sol-gel glass ; thermal softening</subject><ispartof>Journal of microelectromechanical systems, 2006-10, Vol.15 (5), p.1159-1164</ispartof><rights>2007 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2006</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c421t-e3e8eabd137570ea4e2c49a85471a6310232f69d3a044dd144e7e5ae33ee1cbb3</citedby><cites>FETCH-LOGICAL-c421t-e3e8eabd137570ea4e2c49a85471a6310232f69d3a044dd144e7e5ae33ee1cbb3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1707776$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27922,27923,54756</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1707776$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18197920$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Orhan, J.-B.</creatorcontrib><creatorcontrib>Parashar, V.K.</creatorcontrib><creatorcontrib>Sayah, A.</creatorcontrib><creatorcontrib>Gijs, M.A.M.</creatorcontrib><title>Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>We propose a new replication process for the realization of thick microlenses in SiO 2 glass with low organic content. We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photoresist (Clariant AZ 9260), applied to a glass substrate and soft-baked. After demoulding, we obtain cylindrical pillars that are given a dome-like shape by a thermal softening. This structure is used as a master in a second PDMS replication step. An in-house developed sol-gel glass material with low organic content is then poured in the second PDMS replica and subsequently thermally treated to obtain an array of thick, dense and crack-free microlenses. We characterize the shrinkage and the surface roughness of the microlenses. Using imaging of millimeter-size objects in an optical microscope setup, we characterize basic optical properties of the lenses, like focal length, magnification, and distribution of the light intensity around the focal plane</description><subject>Applied sciences</subject><subject>Arrays</subject><subject>Circuit properties</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>Focal plane</subject><subject>Glass</subject><subject>Glass substrates</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>Lenses</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>micro-optics</subject><subject>Microlens array</subject><subject>Microlenses</subject><subject>Micromechanical devices and systems</subject><subject>micromoulding</subject><subject>Microoptics</subject><subject>Optical and optoelectronic circuits</subject><subject>Optical materials</subject><subject>Optical microscopy</subject><subject>Organic materials</subject><subject>photoresist</subject><subject>Photoresists</subject><subject>Physics</subject><subject>poly-dimethylsiloxane (PDMS) replication</subject><subject>Replication</subject><subject>Resists</subject><subject>Shape</subject><subject>Silicone resins</subject><subject>Softening</subject><subject>Sol gel process</subject><subject>sol-gel glass</subject><subject>thermal softening</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkE1LxDAQhoso-PkDxEsRBC9dM0maNEdZdVVcPKh4DLPpFCPZVpPdg_56oxUET_P1zMvMWxSHwCYAzJzdzi_nDxPOmJo02iijNoodMBIqBnWzmXNW60pDrbeL3ZReGQMpG7VTPF_hInqHKz_0JfZtOX3BiG5F0X-OzaErH18iUXXhl9Sn3MJQzr2LQ8hleR4jfqTS9-XDEKoZhXIWMKX9YqvDkOjgN-4VT1eXj9Pr6u5-djM9v6uc5LCqSFBDuGhB6FozQkncSYNNLTWgEsC44J0yrUAmZdvmo0lTjSQEEbjFQuwVp6PuWxze15RWdumToxCwp2GdLCgNoha6qTN6_A99HdYxf5OsAc6ZAs0zBCOU_0spUmffol9i_LDA7LfT9sdp--20HZ3OOye_wpgchi5i73z6W2zAaMNZ5o5GzhPR31gzrbUSXzO0hoE</recordid><startdate>20061001</startdate><enddate>20061001</enddate><creator>Orhan, J.-B.</creator><creator>Parashar, V.K.</creator><creator>Sayah, A.</creator><creator>Gijs, M.A.M.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20061001</creationdate><title>Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass</title><author>Orhan, J.-B. ; Parashar, V.K. ; Sayah, A. ; Gijs, M.A.M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c421t-e3e8eabd137570ea4e2c49a85471a6310232f69d3a044dd144e7e5ae33ee1cbb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Applied sciences</topic><topic>Arrays</topic><topic>Circuit properties</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Fabrication</topic><topic>Focal plane</topic><topic>Glass</topic><topic>Glass substrates</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Integrated optics. Optical fibers and wave guides</topic><topic>Lenses</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>micro-optics</topic><topic>Microlens array</topic><topic>Microlenses</topic><topic>Micromechanical devices and systems</topic><topic>micromoulding</topic><topic>Microoptics</topic><topic>Optical and optoelectronic circuits</topic><topic>Optical materials</topic><topic>Optical microscopy</topic><topic>Organic materials</topic><topic>photoresist</topic><topic>Photoresists</topic><topic>Physics</topic><topic>poly-dimethylsiloxane (PDMS) replication</topic><topic>Replication</topic><topic>Resists</topic><topic>Shape</topic><topic>Silicone resins</topic><topic>Softening</topic><topic>Sol gel process</topic><topic>sol-gel glass</topic><topic>thermal softening</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Orhan, J.-B.</creatorcontrib><creatorcontrib>Parashar, V.K.</creatorcontrib><creatorcontrib>Sayah, A.</creatorcontrib><creatorcontrib>Gijs, M.A.M.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Orhan, J.-B.</au><au>Parashar, V.K.</au><au>Sayah, A.</au><au>Gijs, M.A.M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2006-10-01</date><risdate>2006</risdate><volume>15</volume><issue>5</issue><spage>1159</spage><epage>1164</epage><pages>1159-1164</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>We propose a new replication process for the realization of thick microlenses in SiO 2 glass with low organic content. We start by replicating an array of cylindrical micropillars made in SU-8 negative photoresist (Microchem) into poly-dimethylsiloxane (PDMS). The PDMS replica is filled with a photoresist (Clariant AZ 9260), applied to a glass substrate and soft-baked. After demoulding, we obtain cylindrical pillars that are given a dome-like shape by a thermal softening. This structure is used as a master in a second PDMS replication step. An in-house developed sol-gel glass material with low organic content is then poured in the second PDMS replica and subsequently thermally treated to obtain an array of thick, dense and crack-free microlenses. We characterize the shrinkage and the surface roughness of the microlenses. 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| subjects | Applied sciences Arrays Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fabrication Focal plane Glass Glass substrates Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Lenses Mechanical instruments, equipment and techniques micro-optics Microlens array Microlenses Micromechanical devices and systems micromoulding Microoptics Optical and optoelectronic circuits Optical materials Optical microscopy Organic materials photoresist Photoresists Physics poly-dimethylsiloxane (PDMS) replication Replication Resists Shape Silicone resins Softening Sol gel process sol-gel glass thermal softening |
| title | Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass |
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