High resistivity interfacial layers due to compensation by Sulfur in (Al,Ga)As devices

In p-n junctions grown by LPE in the (Al,Ga)As system, high concentrations of Sulfur can accumulate on the p side of the junction. As a result, a closely compensated, high resistivity region can extend for 0.1-1.0 µm into the p layer. Since sulfur creates deep electron traps in Al 0.4 Ga 0.6 As with...

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Veröffentlicht in:IEEE electron device letters 1981-02, Vol.2 (2), p.46-49
Hauptverfasser: Anthony, P.J., Schumaker, N.E., Zilko, J.L.
Format: Artikel
Sprache:eng
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Zusammenfassung:In p-n junctions grown by LPE in the (Al,Ga)As system, high concentrations of Sulfur can accumulate on the p side of the junction. As a result, a closely compensated, high resistivity region can extend for 0.1-1.0 µm into the p layer. Since sulfur creates deep electron traps in Al 0.4 Ga 0.6 As with a thermal activation energy in bulk p-type material of 0.2 eV, both electrical and optical properties of (Al,Ga)As diode devices can be affected by the interfacial sulfur concentrations.
ISSN:0741-3106
1558-0563
DOI:10.1109/EDL.1981.25335