Torque evaluation of a LIGA fabricated electrostatic micromotor

Torque evaluation of a LIGA fabricated electrostatic micromotor

The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation...

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Veröffentlicht in:Journal of microelectromechanical systems 1999-03, Vol.8 (1), p.115-123
Hauptverfasser: Samper, V.D., Sangster, A.J., Reuben, R.L., Wallrabe, U.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Contact resistance
Devices
Dynamic tests
Electric motors
Electrostatic analysis
Electrostatic devices
Electrostatics
Exact sciences and technology
Finite element method
Finite element methods
Friction
Impedance
Industrial metrology. Testing
Mathematical analysis
Mathematical models
Mechanical engineering. Machine design
Micromotors
Motors
Photolithography
Precision engineering, watch making
Rotors
Shafts
Stators
Torque
Torque measurement
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Beschreibung
Zusammenfassung:The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10/sup -7/ Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.749410