Superconducting half-wave microwave resonator on YSZ buffered Si [100]

Superconducting half-wave microwave resonator on YSZ buffered Si [100]

We have produced high quality superconducting half-wave microwave resonators on YBCO/YSZ/Si heterostructures. The YSZ was grown on [100] Si by pulsed dc magnetron sputtering at 820/spl deg/C in 37 mTorr Ar/O/sub 2/. YBCO was then deposited on the YSZ/Si by pulsed laser ablation at 760/spl deg/C in 0...

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Veröffentlicht in:IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.392-394
Hauptverfasser: Vargas, J.M., Brown, P., Khan, T., Hijazi, Y., Vlasov, Y.A., Larkins, G.L.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Argon
Circuit properties
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Laser ablation
Masers
Microwave measurements
Optical pulses
Oscillators, resonators, synthetizers
Pulsed laser deposition
Sputtering
Superconducting magnets
Superconducting microwave devices
Yttrium barium copper oxide
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Zusammenfassung:We have produced high quality superconducting half-wave microwave resonators on YBCO/YSZ/Si heterostructures. The YSZ was grown on [100] Si by pulsed dc magnetron sputtering at 820/spl deg/C in 37 mTorr Ar/O/sub 2/. YBCO was then deposited on the YSZ/Si by pulsed laser ablation at 760/spl deg/C in 0.5 Torr of O/sub 2/. A coplanar meander-line structure was patterned and its microwave characteristics measured. The results indicate Si to be a definite candidate for microwave applications producing Q values exceeding 50,000 at 4 GHz for T
ISSN:1051-8223
1558-2515
DOI:10.1109/77.919365