Photomodulated reflectance as a valuable nondestructive process tool for VCSELs

Photomodulated reflectance as a valuable nondestructive process tool for VCSELs

Optical reflectivity spectra are useful in assessing the structure of vertical-cavity surface-emitting lasers (VCSELs) but show little of the nature of the active quantum well (QW). Here we use photomodulated reflectance to identify a region of an epitaxial wafer with optimal cavity-QW alignment. Al...

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Veröffentlicht in:IEEE photonics technology letters 2000-10, Vol.12 (10), p.1328-1330
Hauptverfasser: Sale, T.E., Hosea, T.J.C., Thomas, P.J.S.
Format: Artikel
Sprache:eng
Schlagworte:
Devices
Fiber lasers
Marketing and sales
Mirrors
Optical surface waves
Optimization
Quantum well lasers
Reflectance
Reflectivity
Semiconductor lasers
Spectra
Stimulated emission
Surface emitting lasers
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
Wafers
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Beschreibung
Zusammenfassung:Optical reflectivity spectra are useful in assessing the structure of vertical-cavity surface-emitting lasers (VCSELs) but show little of the nature of the active quantum well (QW). Here we use photomodulated reflectance to identify a region of an epitaxial wafer with optimal cavity-QW alignment. AlInGaP-AlGaAs visible VCSEL devices fabricated from this region lased well, compared with devices from a nearby control piece of the wafer which failed to lase at all.
ISSN:1041-1135
1941-0174
DOI:10.1109/68.883819