Monolithic integration of 1.3-/spl mu/m Stark-ladder electroabsorption waveguide modulators with multimode-interference splitters

In this letter, we describe a novel fabrication process for the monolithic integration of a waveguide power splitter based on the multimode-interference effect with multiple-quantum well (MQW) electroabsorption modulators based on the Stark-ladder effect. The integrated device is fabricated by a one-step epitaxy process using molecular-beam-epitaxy growth and three lithographic steps that eliminates the need for aligned regrowth of the MQW modulator. Experimental results of the modulation depth and wavelength dependence are also reported.