Quasi-planar monolithic integration of high-speed VCSEL and resonant enhanced photodetector arrays

Quasi-planar monolithic integration of high-speed VCSEL and resonant enhanced photodetector arrays

We describe the quasi-planar monolithic integration of oxide-confined vertical-cavity surface-emitting laser (VCSEL) and resonant enhanced photodetector (REPD) arrays. These high speed devices are fabricated using an approach in which current apertures with a range of different sizes are formed by c...

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Veröffentlicht in:IEEE photonics technology letters 1999-05, Vol.11 (5), p.512-514
Hauptverfasser: Alduino, A.C., Luong, S.Q., Zhou, Y., Hains, C.P., Cheng, J.
Format: Artikel
Sprache:eng
Schlagworte:
Apertures
Arrays
Devices
High speed
High speed optical techniques
Monolithic integrated circuits
Optical arrays
Optical devices
Oxidation
Oxides
Photodetectors
Preserves
Resonance
Surface emitting lasers
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
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Beschreibung
Zusammenfassung:We describe the quasi-planar monolithic integration of oxide-confined vertical-cavity surface-emitting laser (VCSEL) and resonant enhanced photodetector (REPD) arrays. These high speed devices are fabricated using an approach in which current apertures with a range of different sizes are formed by concatenating a number of discrete crescent shaped oxidation fronts. This approach preserves planarity while improving dimensional control for devices with very small oxide apertures (
ISSN:1041-1135
1941-0174
DOI:10.1109/68.759382