Wet etching of proton-exchanged lithium niobate-a novel processing technique

Wet etching of proton-exchanged lithium niobate-a novel processing technique

A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c/sup +/-face of the crystal can be etched away using a mixture of HF:HNO/sub 3/ while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton...

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Veröffentlicht in:Journal of lightwave technology 1992-11, Vol.10 (11), p.1606-1609
Hauptverfasser: Laurell, F., Webjorn, J., Arvidsson, G., Holmberg, J.
Format: Artikel
Sprache:eng
Schlagworte:
Annealing
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Hafnium
Integrated optics
Integrated optics. Optical fibers and wave guides
Laser ablation
Lithium niobate
Optical and optoelectronic circuits
Optical surface waves
Optical waveguides
Protons
Stress
Wet etching
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Beschreibung
Zusammenfassung:A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c/sup +/-face of the crystal can be etched away using a mixture of HF:HNO/sub 3/ while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures.< >
ISSN:0733-8724
1558-2213
DOI:10.1109/50.184899