2D silicon/ferroelectric liquid crystal spatial light modulators

2D silicon/ferroelectric liquid crystal spatial light modulators

We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256/spl...

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Veröffentlicht in:IEEE MICRO 1995-08, Vol.15 (4), p.67-76
Hauptverfasser: Drabik, T.J., Titus, A.H., Handschy, M.A., Banas, D., Gaalema, S.D., Ward, D.J.
Format: Artikel
Sprache:eng
Schlagworte:
Ferroelectric materials
Foundries
LCDs
Light
Liquid crystal devices
Liquid crystal displays
Liquid crystals
Optical arrays
Optical device fabrication
Optical modulation
Silicon
Spatial resolution
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Beschreibung
Zusammenfassung:We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256/spl times/256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.< >
ISSN:0272-1732
1937-4143
DOI:10.1109/40.400643