Multichip packaging technology with laser-patterned interconnects

A multichip silicon-on-silicon packaging technology has been developed which incorporates laser-patterned thin-film interconnects. This technology is particularly suited for application in high-speed, high-power, and high-I/O systems, where its unique characteristics provide many advantages over mor...

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Veröffentlicht in:IEEE transactions on components, hybrids, and manufacturing technology hybrids, and manufacturing technology, 1989-12, Vol.12 (4), p.646-649
Hauptverfasser: Barfknecht, A.T., Tuckerman, D.B., Kaschmitter, J.L., McWilliams, B.M.
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container_issue 4
container_start_page 646
container_title IEEE transactions on components, hybrids, and manufacturing technology
container_volume 12
creator Barfknecht, A.T.
Tuckerman, D.B.
Kaschmitter, J.L.
McWilliams, B.M.
description A multichip silicon-on-silicon packaging technology has been developed which incorporates laser-patterned thin-film interconnects. This technology is particularly suited for application in high-speed, high-power, and high-I/O systems, where its unique characteristics provide many advantages over more traditional methods. The laser-patterned thin-film interconnects allow higher I/O densities and better electrical performance than wire bonds or TAB (tape automated bonding). The face-up, thin-film eutectic die attach technique used provides much lower thermal resistance between the substrate and the chips than can be achieved with solder bump die attach. In addition, laser-patterned interconnects demonstrate superior ruggedness and fatigue resistance under thermomechanical cycling and shock. This technology has been used to produce a ten-chip memory module, samples of which have been subjected to testing by means of relevant methods of MIL-STD 883C.< >
doi_str_mv 10.1109/33.49028
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source IEEE Electronic Library (IEL)
subjects Applied sciences
Bonding
Design. Technologies. Operation analysis. Testing
Electric resistance
Electronics
Exact sciences and technology
Fatigue
Integrated circuits
Microassembly
Packaging
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductor thin films
Substrates
Thermal resistance
Transistors
Wire
title Multichip packaging technology with laser-patterned interconnects
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