Multichip packaging technology with laser-patterned interconnects

A multichip silicon-on-silicon packaging technology has been developed which incorporates laser-patterned thin-film interconnects. This technology is particularly suited for application in high-speed, high-power, and high-I/O systems, where its unique characteristics provide many advantages over mor...

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Veröffentlicht in:IEEE transactions on components, hybrids, and manufacturing technology hybrids, and manufacturing technology, 1989-12, Vol.12 (4), p.646-649
Hauptverfasser: Barfknecht, A.T., Tuckerman, D.B., Kaschmitter, J.L., McWilliams, B.M.
Format: Artikel
Sprache:eng
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Zusammenfassung:A multichip silicon-on-silicon packaging technology has been developed which incorporates laser-patterned thin-film interconnects. This technology is particularly suited for application in high-speed, high-power, and high-I/O systems, where its unique characteristics provide many advantages over more traditional methods. The laser-patterned thin-film interconnects allow higher I/O densities and better electrical performance than wire bonds or TAB (tape automated bonding). The face-up, thin-film eutectic die attach technique used provides much lower thermal resistance between the substrate and the chips than can be achieved with solder bump die attach. In addition, laser-patterned interconnects demonstrate superior ruggedness and fatigue resistance under thermomechanical cycling and shock. This technology has been used to produce a ten-chip memory module, samples of which have been subjected to testing by means of relevant methods of MIL-STD 883C.< >
ISSN:0148-6411
1558-3082
DOI:10.1109/33.49028