A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers). By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEICs in future fiber-...

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Veröffentlicht in:	IEEE journal of selected topics in quantum electronics 1997-12, Vol.3 (6), p.1308-1320
Hauptverfasser:	Moerman, I., Van Daele, P.P., Demeester, P.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Costs Fabrication III-V semiconductor materials Monolithic integrated circuits Optical fiber devices Optical refraction Optical variables control Optical waveguides Semiconductor device packaging Semiconductor waveguides
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