A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers). By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEICs in future fiber-...

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Veröffentlicht in:IEEE journal of selected topics in quantum electronics 1997-12, Vol.3 (6), p.1308-1320
Hauptverfasser: Moerman, I., Van Daele, P.P., Demeester, P.M.
Format: Artikel
Sprache:eng
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Zusammenfassung:The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers). By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEICs in future fiber-optical networks can be much reduced. This paper gives an overview of different taper designs, the possible fabrication technologies and performances of tapered devices.
ISSN:1077-260X
1558-4542
DOI:10.1109/2944.658785