Optical characteristics of silicon semiconductor bridges under high current density conditions

The optical emission spectra (180-700 nm) of plasma produced by a semiconductor bridge (SCB) with aluminum or tungsten electrodes have been measured and analyzed. The spatially and temporally resolved emission spectra of the SCB device have provided insights into the dynamic discharge of the bridge....

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Veröffentlicht in:IEEE transactions on electron devices 2001-05, Vol.48 (5), p.852-857
Hauptverfasser: Jongdae Kim, Tae Moon Roh, Kyoung-Ik Cho, Jungling, K.C.
Format: Artikel
Sprache:eng
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Zusammenfassung:The optical emission spectra (180-700 nm) of plasma produced by a semiconductor bridge (SCB) with aluminum or tungsten electrodes have been measured and analyzed. The spatially and temporally resolved emission spectra of the SCB device have provided insights into the dynamic discharge of the bridge. The plasma electron temperature of the SCB device was measured using the comparison of the continuum emission of the bridge with the calculated optical emission spectra for a gray body source. Measured electron temperatures in the plasma produced by the bridges are related to the capacitor discharging voltage. The best estimates indicate that 4100-5500 K was measured for Al-electrode SCB device and 5650-6000 K for W-electrode SCB device.
ISSN:0018-9383
1557-9646
DOI:10.1109/16.918230