Quarter-micrometer SPI (Self-aligned Pocket Implantation) MOSFET's and its application for low supply voltage operation

A novel SPI (Self-aligned Pocket Implantation) technology has been presented, which improves short channel characteristics without increasing junction capacitance. This technology features a localized pocket implantation using gate electrode and TiSi/sub 2/ film as self-aligned masks. An epi substrate is used to decrease the surface impurity concentration in the well while maintaining high latch-up immunity. The SPI and the gate to drain overlapped structure such as LATID (Large-Angle-Tilt Implanted Drain) technology allow use of the ultra low impurity concentration in the channel region, resulting in higher saturation drain current at the same gate over-drive compared to conventional device. The carrier velocity reaches 8/spl times/10/sup 6/ cm/sec and subthreshold slope is less than 75 mV/dec, which can be explained by low impurity concentration in the channel and in the substrate. The small gate depletion layer capacitance of SPI MOSFET was estimated by C-V measurement, and it can explain high performance such as small subthreshold slope. On the other hand, the problem and the possibility of low supply voltage operation have been discussed, and it has been proposed that small subthreshold slope is prerequisite for low power device operated at low supply voltage. In addition, the drain junction capacitance of SPI is decreased by 65% for N-MOSFET's, and 69% for P-MOSFET's both compared with conventional devices. This technology yields an unloaded CMOS inverter of 48 psec delay time at the supply voltage of 1.5 V.< >