Direct inversion of interfacial reflectivity data using the Patterson function

It is shown here that the interfacial profile between two bonded wafers can be directly determined using X‐ray reflectivity without resorting to standard model‐fitting of the data. The phase problem inherent to any structure determination by scattering technique is solved in this case using a known...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of applied crystallography 2003-12, Vol.36 (6), p.1352-1355
Hauptverfasser:	Bataillou, Benoît, Moriceau, Hubert, Rieutord, François
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology interfaces phase determination Physics Structure of solids and liquids crystallography X-ray diffraction and scattering X-ray reflectivity X-ray scattering (including small-angle scattering)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!