Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

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Veröffentlicht in:Physical review applied 2019-06, Vol.11 (6), Article 064056
Hauptverfasser: Barnes, Bryan M., Henn, Mark-Alexander, Sohn, Martin Y., Zhou, Hui, Silver, Richard M.
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container_issue 6
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container_title Physical review applied
container_volume 11
creator Barnes, Bryan M.
Henn, Mark-Alexander
Sohn, Martin Y.
Zhou, Hui
Silver, Richard M.
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doi_str_mv 10.1103/PhysRevApplied.11.064056
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title Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity
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