Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

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Veröffentlicht in:Physical review. A, Atomic, molecular, and optical physics Atomic, molecular, and optical physics, 2001-06, Vol.63 (6), Article 063407
Hauptverfasser: Kok, Pieter, Boto, Agedi N., Abrams, Daniel S., Williams, Colin P., Braunstein, Samuel L., Dowling, Jonathan P.
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container_issue 6
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container_title Physical review. A, Atomic, molecular, and optical physics
container_volume 63
creator Kok, Pieter
Boto, Agedi N.
Abrams, Daniel S.
Williams, Colin P.
Braunstein, Samuel L.
Dowling, Jonathan P.
description
doi_str_mv 10.1103/PhysRevA.63.063407
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title Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns
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