CMOS-compatible batch processing of monolayer MoS 2 MOSFETs

CMOS-compatible batch processing of monolayer MoS 2 MOSFETs

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2018-04, Vol.51 (15), p.15
Hauptverfasser: Xiong, Kuanchen, Kim, Hyun, Marstell, Roderick J, Göritz, Alexander, Wipf, Christian, Li, Lei, Park, Ji-Hoon, Luo, Xi, Wietstruck, Matthias, Madjar, Asher, Strandwitz, Nicholas C, Kaynak, Mehmet, Lee, Young Hee, Hwang, James C M
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container_issue 15
container_start_page 15
container_title Journal of physics. D, Applied physics
container_volume 51
creator Xiong, Kuanchen
Kim, Hyun
Marstell, Roderick J
Göritz, Alexander
Wipf, Christian
Li, Lei
Park, Ji-Hoon
Luo, Xi
Wietstruck, Matthias
Madjar, Asher
Strandwitz, Nicholas C
Kaynak, Mehmet
Lee, Young Hee
Hwang, James C M
description
doi_str_mv 10.1088/1361-6463/aab4ba
format Article
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title CMOS-compatible batch processing of monolayer MoS 2 MOSFETs
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