Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures

This work describes the design, fabrication, modeling, and testing of monolithic micromachined parylene-based electroactive membranes ( µ PEMs) with embedded microfluidic channels. The design and modeling employed analytical plate theory to determine the optimal membrane dimensions and structural sh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of micromechanics and microengineering 2023-09, Vol.33 (9), p.95010
Hauptverfasser:	Rebolledo Uscanga, Fernando Antonio, Pierce, Mark C, Zahn, Jeffrey D
Format:	Artikel
Sprache:	eng
Schlagworte:	dynamic motion measurements electrostatic actuation Lab-On-A-Chip microshell structures polymer micromachining polymer-based MEMS System-On-A-Chip
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!