Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures

This work describes the design, fabrication, modeling, and testing of monolithic micromachined parylene-based electroactive membranes ( µ PEMs) with embedded microfluidic channels. The design and modeling employed analytical plate theory to determine the optimal membrane dimensions and structural shapes for various microsystem designs. The µ PEMs were fabricated using a combination of surface and bulk micromachining techniques incorporating Parylene C as a biocompatible polymeric structural material combined with patterned electrodes for actuation. Experimental actuation of the electroactive membranes demonstrated reliability with minimal voltage shifts, and theoretical pull-in voltages closely matching experimental results. Different structural parameters of the µ PEMs were also tested, such as varying the overall membrane thickness/structural rigidity and actuation chamber depth. Dynamic actuation of the membrane, including, the deflection and system response to various actuation frequencies, was observed and quantified via optical coherence tomography techniques. Microfluidic architectures were monolithically integrated with the membrane actuator and successfully perfused, with no signs of leakage. This compact microsystem has potential applications in microfluidics and Lab/System-On-a-Chip devices, for use in micromixers, particle manipulators, and applying strain to adherent cells cultured on top of the membrane.