Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Fused silica (FS) micro hemispherical resonators have attracted considerable interest for application in high-performance sensors. Manufacturing of resonators with extremely high quality factor and acceptable cost is currently the main challenge. Here, we demonstrate the application of ultrafast laser in manufacturing of three-dimensional (3D) FS micro hemispherical resonators with unrestricted edge shapes. The 3D FS structures fabricated from micro glassblowing are detached from substrates by direct laser ablation with amplification tines, which is useful for improving the performance of the resonators. Resonators fabricated from direct laser ablation are experimentally characterized, exhibiting quality factors over millions via electrostatically characterization. This is the first time that ultrafast lasers are exploited in the manufacturing of mechanical resonators, while obtaining satisfactory performance. Effective integration of the laser ablation into current devices will greatly improve the fabrication ability, generating important implications for future micro electronic devices.