Fabrication method of quartz glass ring resonator using sacrificial support structure

Fabrication method of quartz glass ring resonator using sacrificial support structure

In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant freque...

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Veröffentlicht in:Journal of micromechanics and microengineering 2020-11, Vol.30 (11), p.115018
Hauptverfasser: Jehanzeb Khan, Muhammad, Tsukamoto, Takashiro, Tanaka, Shuji
Format: Artikel
Sprache:eng
Schlagworte:
MEMS gyroscope
quartz glass resonator
ring resonator
sacrificial supporting structure
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Zusammenfassung:In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/abb753