Microfeatures and microfabrication: current role of micro-electric discharge machining

The field of microfeatures and microdevices is an emergent field, with applications extending from cooling of turbine blades to drug delivery in the human body. Fabrication of these features, microfabrication, is a challenge as it requires precise control over material removal in the micro domain. T...

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Veröffentlicht in:Journal of micromechanics and microengineering 2019-04, Vol.29 (4), p.43002
Hauptverfasser: Singh, S K, Mali, H S
Format: Artikel
Sprache:eng
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Zusammenfassung:The field of microfeatures and microdevices is an emergent field, with applications extending from cooling of turbine blades to drug delivery in the human body. Fabrication of these features, microfabrication, is a challenge as it requires precise control over material removal in the micro domain. There are several techniques available for microfabrication, of which micro-electric discharge machining (μ-EDM) has emerged as a leading technique for its versatility on different materials and ability to fabricate intricate parts and features. This paper presents compiled information on microfeatures, their applications, and different microfabrication techniques with emphasis on the current status and role of -EDM in microfabrication.
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ab0249