Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling

Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling

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Veröffentlicht in:Journal of micromechanics and microengineering 2018-05, Vol.28 (5), p.54006
Hauptverfasser: Kuenzig, Thomas, Dehé, Alfons, Krumbein, Ulrich, Schrag, Gabriele
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container_title Journal of micromechanics and microengineering
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creator Kuenzig, Thomas
Dehé, Alfons
Krumbein, Ulrich
Schrag, Gabriele
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doi_str_mv 10.1088/1361-6439/aab0d7
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title Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling
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