Thin piezoelectric VDF-TrFE copolymer films for data storage

We used the Scanning Nearfield Acoustic Microscope-a nontouching profilometer with a conducting tip-both to pole thin ferroelectric VDF-TrFE copolymer films and to subsequently monitor the resulting pie-zoelectrically stimulated surface motion. For thin uncovered polymer films we were able to measur...

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Veröffentlicht in:Integrated ferroelectrics 1992-07, Vol.1 (2-4), p.379-384
Hauptverfasser: Güthner, Peter, Glatz-Reichenbach, Joachim, Schilling, Doris, Dransfeld, Klaus
Format: Artikel
Sprache:eng
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Zusammenfassung:We used the Scanning Nearfield Acoustic Microscope-a nontouching profilometer with a conducting tip-both to pole thin ferroelectric VDF-TrFE copolymer films and to subsequently monitor the resulting pie-zoelectrically stimulated surface motion. For thin uncovered polymer films we were able to measure simultaneously the piezoactivity and the surface topography with a lateral resolution of 1 μm. Furthermore we used a focused electron beam to create a poling pattern of narrow lateral extension and detected the corresponding local piezoactivity by using the Scanning Nearfield Acoustic Microscope.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584589208215725