Experimental investigations on nanogrinding of RB-SiC wafers
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| Veröffentlicht in: | Materials and manufacturing processes 2018-07, Vol.33 (9), p.1030-1035 |
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| Sprache: | eng |
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| container_end_page | 1035 |
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| container_issue | 9 |
| container_start_page | 1030 |
| container_title | Materials and manufacturing processes |
| container_volume | 33 |
| creator | Feng, Guang Liu, Qiuzu Guo, Wenliang Xin, Yupeng Liang, Qunlong |
| description | |
| doi_str_mv | 10.1080/10426914.2018.1424906 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1042-6914 |
| ispartof | Materials and manufacturing processes, 2018-07, Vol.33 (9), p.1030-1035 |
| issn | 1042-6914 1532-2475 |
| language | eng |
| recordid | cdi_crossref_primary_10_1080_10426914_2018_1424906 |
| source | Business Source Complete |
| title | Experimental investigations on nanogrinding of RB-SiC wafers |
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