A γ-ray and small-angle neutron scattering study of oxygen precipitation in silicon single crystals

A γ-ray and small-angle neutron scattering study of oxygen precipitation in silicon single crystals

Oxygen precipitation in heat-treated Czochralski-grown silicon single crystals has been investigated using γ-ray diffraction combined with small-angle neutron scattering and infrared absorption measurements. Diffuse scattering around the diffraction peaks was observed using γ-rays and this is associ...

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Veröffentlicht in:Philosophical magazine letters 1988-10, Vol.58 (4), p.183-188
Hauptverfasser: Kinder, S. H., Messoloras, S., Stewart, R. J.
Format: Artikel
Sprache:eng
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Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Other topics in equations of state, phase equilibria, and phase transitions
Physics
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container_title Philosophical magazine letters
container_volume 58
creator Kinder, S. H.
Messoloras, S.
Stewart, R. J.
description Oxygen precipitation in heat-treated Czochralski-grown silicon single crystals has been investigated using γ-ray diffraction combined with small-angle neutron scattering and infrared absorption measurements. Diffuse scattering around the diffraction peaks was observed using γ-rays and this is associated with oxygen precipitation in the silicon lattice. The analysis of the diffuse scattering produces an average precipitate size in agreement with small-angle neutron scattering measurements.
doi_str_mv 10.1080/09500838808214751
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source Periodicals Index Online; Taylor & Francis Journals Complete
subjects Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Other topics in equations of state, phase equilibria, and phase transitions
Physics
title A γ-ray and small-angle neutron scattering study of oxygen precipitation in silicon single crystals
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