A γ-ray and small-angle neutron scattering study of oxygen precipitation in silicon single crystals

Oxygen precipitation in heat-treated Czochralski-grown silicon single crystals has been investigated using γ-ray diffraction combined with small-angle neutron scattering and infrared absorption measurements. Diffuse scattering around the diffraction peaks was observed using γ-rays and this is associ...

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Veröffentlicht in:	Philosophical magazine letters 1988-10, Vol.58 (4), p.183-188
Hauptverfasser:	Kinder, S. H., Messoloras, S., Stewart, R. J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Equations of state, phase equilibria, and phase transitions Exact sciences and technology Other topics in equations of state, phase equilibria, and phase transitions Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Oxygen precipitation in heat-treated Czochralski-grown silicon single crystals has been investigated using γ-ray diffraction combined with small-angle neutron scattering and infrared absorption measurements. Diffuse scattering around the diffraction peaks was observed using γ-rays and this is associated with oxygen precipitation in the silicon lattice. The analysis of the diffuse scattering produces an average precipitate size in agreement with small-angle neutron scattering measurements.
ISSN:	0950-0839 1362-3036
DOI:	10.1080/09500838808214751