Modulation of silica layer properties by varying the granulometric state of tetraethyl orthosilicate precursor aerosols during combustion chemical vapor deposition (CCVD)

For the purpose of silica surface layer modulation, a pneumatic-controlled two-substance atomizer with inertia-based coarse droplet separation was operated at different system pressures for tetraethyl orthosilicate precursor aerosol supply during combustion chemical vapor deposition. A comprehensive...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Aerosol science and technology 2020-10, Vol.54 (10), p.1124-1134
Hauptverfasser:	Kretzschmar, Björn Sten Mark, Bergelt, Paul, Göhler, Daniel, Firmbach, Fabian, Köcher, Ronny, Heft, Andreas, Stintz, Michael, Grünler, Bernd
Format:	Artikel
Sprache:	eng
Schlagworte:	Aerosol particles Aerosol research Aerosols Atomic force microscopy Atomizing Chemical vapor deposition Combustion Condensates Contact angle Electric contacts Electron microscopy Ellipsometry Hydrophobicity Light transmission Mark Swihart Mass flow Microscopy Modulation Particle production Physical properties Precursors Silica Silicon dioxide Spectrometry Surface boundary layer Surface layers Surface structure Tetraethyl orthosilicate Thickness Vapor phases
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!