Dependence of the anisotropy of the secondary ion-electron emission coefficient upon ion energy

The angular dependences of the secondary ion-electron emission coefficient of copper crystal have been studied experimentally in wide angular and energy ranges. The obtained regularities are discussed in terms of the Onderdelinden theory of sputtering.

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Radiat. Eff. 8: No. 1-2, 71-6(Mar 1971) 71-6(Mar 1971), 1971-03, Vol.8 (1-2), p.71-76
Hauptverfasser: Brusilovsky, B. A., Molchanov, V. A.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The angular dependences of the secondary ion-electron emission coefficient of copper crystal have been studied experimentally in wide angular and energy ranges. The obtained regularities are discussed in terms of the Onderdelinden theory of sputtering.
ISSN:0033-7579
DOI:10.1080/00337577108231011