Dependence of the anisotropy of the secondary ion-electron emission coefficient upon ion energy
The angular dependences of the secondary ion-electron emission coefficient of copper crystal have been studied experimentally in wide angular and energy ranges. The obtained regularities are discussed in terms of the Onderdelinden theory of sputtering.
Gespeichert in:
Veröffentlicht in: | Radiat. Eff. 8: No. 1-2, 71-6(Mar 1971) 71-6(Mar 1971), 1971-03, Vol.8 (1-2), p.71-76 |
---|---|
Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The angular dependences of the secondary ion-electron emission coefficient of copper crystal have been studied experimentally in wide angular and energy ranges.
The obtained regularities are discussed in terms of the Onderdelinden theory of sputtering. |
---|---|
ISSN: | 0033-7579 |
DOI: | 10.1080/00337577108231011 |